5K.KOSKI, J.HOKSA, P.JULIET. Deposition of aluminium oxide thin films by reactive magnetron sputtering[J].Surface coatings and technology, 1999,116-119:716-720.
6JOSEPH, BENNY. A study on the chemical spray deposition of zinc oxide thin films and their structural and electrical properties [J]. Materials Chemistry and Physics, 1999, 58: 71-77.
7XU W L,ZhENG M J,WU S, et al. Effects of high-temperature anealing on structural and optical properties of highly ordered porous alumina membranes[J].Appl Phys Lett,2004,85:4364-4365.
8JONSSON B, HOGMARK S. Hardness Measurements of Thin Films[J]. Thin Solid Films,1984,114:257-269.
9CHECHENIN N G, BOTTIGER J, KROG J P. Nanoindentation of Amorphous Aluminum Oxide Films Ⅰ. The Influence of the Substrate on the Plastic Properties [J]. Thin Solid Films ,1995,261:219-227.
10WIEDEMANM R,WEIHNACHT V,OETTEL H.Structure and mechanical properties of amorphous Ti-B-N coatings[J].Surface and Coatings Technology,1999,116-119,302-309.
