摘要
场发射扫描电子显微镜 (FESEM)是一种高分辨扫描电镜 ,在材料分析中得到广泛应用。尤其是良好的低压高空间分辨性能和低压下良好的SE像相互结合使用 。
Field emission scanning electron microscope (FESEM) is a kind of high resolution scanning electron microscope. It has been widely used in material research, because of its enhanced capability of high spatial resolution element analysis and high quality image at low accelerate voltage.
出处
《电子显微学报》
CAS
CSCD
北大核心
2001年第4期275-278,共4页
Journal of Chinese Electron Microscopy Society
