摘要
对集成化平面电感的串联电阻对电感 Q值的影响进行了计算机模拟分析 ,结果表明 ,微型电感中的串联电阻对电感 Q值的影响严重 ,在电感的串联电阻大于 2 0 0Ω时 ,电感的 Q值下降到 1左右 ,已无法满足实际需要。围绕微型电感中对串联电阻起主要作用的导通电阻开展实验 ,得出了降低导通电阻的最佳工艺条件 。
Effect of series resistance in integrated planar micro inductor on Q value is simulated and analyzed. It has been shown that when the series resistance in the micro inductor is larger than 200 Ω, the Q value decreases to about 1, which cannot satisfy requirements in practical applications. An experiment is conducted on the on resistance that has a major contribution to the series resistance, and optimal process conditions for lower on resistance are obtained.
出处
《微电子学》
CAS
CSCD
北大核心
2001年第5期360-362,共3页
Microelectronics
基金
光电技术及系统教育部重点实验室资助项目 (CETD0 0 - 0 7)
关键词
集成电路
微型电感
导通电阻
串联电阻
Micro inductance
On resistance
Series resistance
Q value
