摘要
介绍了坐标测量机高精度测头的研究发展现状 ;分析了接触方式、光学方式、扫描方式测头的优缺点 ;研究了日本松下公司研制的高精度测头测量原理 ;基于原子力微探针的基本原理 ,设计了一种新型的坐标测量机测头 ;指出了采用原子力准接触技术是测头向高精度发展的方向之一。
Research and development status of high-precision probe of CMM is introduced; advantages & disadvantages of contact, optical and scanning probe are analyzed; measuring principle of high-precision measurement developed by Japanese Panasonic Co. is studied; a new type of CMM probe is designed based on the basic principle for atomic force micro probe. The text points out that to use atomic force near-contact technology is one of the tendencies for probe to develop toward high-precision one.
出处
《制造技术与机床》
CSCD
北大核心
2001年第10期28-29,30,共3页
Manufacturing Technology & Machine Tool
基金
哈尔滨青年科学基金"坐标测量机纳米精度瞄准测头的技术研究"(项目编号 :9961 2 1 80 1 0 )资助
