摘要
反应溅射制备ＡｌＮ 薄膜时，薄膜的择优取向与众多的实验参数有关．建立晶面择优取向程度与溅射气压、靶基距、靶功率等重要实验参数之间的函数关系，避免了研究每一项参数对薄膜择优取向影响所需的实验次数的繁多，得到制备择优取向程度最佳薄膜的实验参数．同时，通过用该函数关系式计算得到结果与实验结果比较，发现两者具有很好的一致性．这一系列函数关系式的建立，对进一步设计新的实验方案、验证已有的实验结果以及制备良好择优取向薄膜都有着重要意义．
The preferential orientation intensity of AlN films depends on several deposition parameters. For the first time, the function relation formulae between the intensity of preferential orientation of the films and experimental parameters (such as sputtering pressure, target power and the distance) were found. It is common practice to perform a number of deposition experiments by varying the controllable parameters to determine the optimal films growth conditions. The comparison of the experimental results and computational results obtained by using the function relation formula indicates that two results have a good agreement with each other. The foundation of these function relation formulae is of great signification for furthermore designing of a new experimental scheme, validating an old experimental result, or preparing the good preferential orientation films.
出处
《无机材料学报》
SCIE
EI
CAS
CSCD
北大核心
2001年第6期1161-1168,共8页
Journal of Inorganic Materials
基金
教育部高等学校骨干教师资助计划项目
山西省自然科学基金
山西省青年科学基金资助
关键词
氮化铝薄膜
实验参数
择优取向
函数关系
制备
反应溅射
aluminium nitride films
experimental parameters
preferential orientation
function relation
