摘要
介绍了一种新型的微机械硅弹簧的设计和制作 ,运用能量方法推导出了弹性常数的计算公式 ,并用有限元模拟分析方法求出了其固有频率。有限元模拟工具AN SYS模拟的结果验证了弹性常数的计算公式 。
A novel MEMS silicon spring has been successfully designed and fabricated.The formula used to calculate the spring constant were derived by energy method.The natural frequency of the spring was analyzed by simulation analysis using Finite Element Method.The computation formula of the spring constant was verified with ANSYS Finite Element Method.Theoretical analysis and fabrication process indicated that the design was feasible.
出处
《微细加工技术》
2001年第4期70-73,69,共5页
Microfabrication Technology
关键词
微机电系统
硅弹簧
弹性常数
有限元
微细加工
micro electro mechanical system(MEMS)
silicon spring
spring constant
natural frequency
Finite Element Method
