摘要
永磁薄膜是未来微波或光隔离器和环行器 ,以及微马达中必不可少的材料。介绍了近二十年来单 (硬磁 )相永磁薄膜的研究进展 ,以及在某些微型器件上的应用 。
Permanent magnetic films are essential to the future microwave or optical isolators or circulator and micromotors. This paper shows research status on the single (magnetically hard) phase permanent magnetic films in the past twenty years as well as some applications on the micro device,and made a prospect for research of the permanent magnetic films.
出处
《磁性材料及器件》
CAS
CSCD
2001年第4期27-33,13,共8页
Journal of Magnetic Materials and Devices
关键词
永磁薄膜
磁性能
磁性材料
permanent magnetic thin film
texture
process
magnetic properties
application
