摘要
硅微压力传感器由于体积小、重量轻、精度高、成本低等特点应用很广泛,在某些领域已取代传统的传感器。进一步研制小体积高精度的传感器,扩大其应用范围已势在必行。本工作主要从提高传感器的性能角度来分析掩膜版设计中的重要问题,并对设计制作的传感器进行静态测试,取得了满意的实验结果。
The micro silicon pressure sensor i s widely used,due to its advantages o f little volume,light weigh,high precision and low cost.I n many fields,the micro silicon pressure sensor has replaced some traditional sensors.Furthermore,it is necessary to fabricate sensor with less volume and higher precision.and to extend the fields of applicati on.In this paper,the design of micro mask was discussed in sensor terms of the improving the characteristic of the micro sensor,and the measurement of micro pressure was tested,and the conclusion is satisfied.
出处
《功能材料与器件学报》
CAS
CSCD
2001年第4期365-368,共4页
Journal of Functional Materials and Devices
基金
国家重点基础研究发展规划项目(G1999033103)
国家自然科学基金资助项目(59775074)
国家教育部博士点基金资助项目(1999069821)
