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弱导波导多模干涉耦合器结构参量优化设计 被引量:5

OPTIMAL DESIGN OF WEAK-WAVEGUIDE MULTIMODE INFERENCE COUPLER STRUCTURE
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摘要 本文分析了以硅基底上二氧化硅波导为代表的弱导波导多模干涉 (MMI)耦合器件输入 (出 )波导位置及宽度和 MMI长度等结构参量对器件性能的影响 .提出了参量空间法 ,在给定工艺材料参量和多模波导宽度情况下 ,通过匹配各结构参量 ,制出均匀性好、附加损耗低的弱导波导多模干涉耦合器件 . The effect of the multimode inference (MMI) structure parameters,namely,the position and width of the input(output) waveguides,the width of the inference section,to the characteristics of the MMI splitter is considered.For given material parameters and width of inference section,a parameter space method is proposed to achieve a MMI splitter with good uniformity and low loss.
出处 《光子学报》 EI CAS CSCD 北大核心 2002年第3期354-359,共6页 Acta Photonica Sinica
关键词 多模波导干涉耦合器 模式传输分析 自成象理论 结构参量 优化设计 Multimode inference coupler Mode propagation analysis Self-image theory
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参考文献9

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同被引文献29

  • 1王章涛,樊中朝,陈少武,余金中.SOI通道转换型多模干涉耦合器的研究(英文)[J].光子学报,2004,33(9):1047-1049. 被引量:1
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