摘要
标样气体进样系统用于质谱计的标样气体校准 ,以获得准确的测量数据。介绍了标样气体进样系统的结构、工作原理及进样方法 ,给出了标样气体配置的不确定度分析和测试结果。
The inlet system of the standard gas is used to calibrate mass spectrometers with the standard gas.The structure,operation principle and inlet methods of the standard gas are introduced.The uncertainty analysis of standard gas and the test results are also presented.
出处
《真空与低温》
2002年第1期39-45,共7页
Vacuum and Cryogenics
