摘要
根据硅各向异性腐蚀特点 ,在硅各向异性腐蚀速率图基础上 ,提出算法 ,利用数学软件 MATL AB模拟了几种简单掩膜图形的腐蚀过程 .程序从二维掩膜描述出发 ,找到相关晶面 ,产生动态的三维几何结构的输出 .并推导出凸角补偿时补偿条的相关尺寸 .其结果对
According to the property of anisotropic etching of the single- crystal silicon,som e com puter programs based on MATL AB are described which can be used to simulate the etching processes of simple m ask structures.Starting from the de- scribing of a2 - D m ask layout,the programs find the relevant etching planes and create a dynam ic output of the etched3- D structure.The sim uleted results on the convex corner compensation agree well with available experiments.
基金
教育部科学与技术研究重点项目 ( No.0 0 0 6 5 )~~
