摘要
高精度高性能的光学薄膜膜厚监控系统是制备密集波分复用滤光片的关键,本文提出了一种非1/4波长膜系监控膜厚的方法,该方法所采用的系统具有稳定性好、波长分辨率高等优点。
High precision and high performance optical thickness monitor is a key component to monitoring the optical thickness when deposing the DWDM filter. A film thickness control method for non-quarter wavelength film is presented in this paper. This optical thickness monitor has advantage of high stability and high resolution.
出处
《真空电子技术》
2002年第2期5-7,共3页
Vacuum Electronics
基金
广东省重点科技攻关课题(2KB02402G)
关键词
膜厚监控
密集波分复用滤光片
介质膜
Optical thickness monitor
DWDM filter
Dielectric thin film
