摘要
采用特种工艺 ,将高绝缘强度、高介电常数的Al2 O3 制成的电介质薄层覆盖在电极表面 ,应用窄间隙结构组成介质阻挡放电装置 ,能够在大气压或高于大气压条件下实现强电离放电 ,获得的折合电场强度大于 4 0 0Td ,电子平均能量大于 10eV ,电子密度高于 10 15/cm3 ·这足以使等离子体化学反应腔体里大部分的气体分子离解、电离成电子、离子、自由基、激发态原子等活性粒子 。
A novel dielectric barrier discharge device with narrow gaps structure was designed. The electrodes of the device were covered by Al 2O 3 thinner layers of high insulation and high dielectric constant. Using this device, the strong ionization discharge could be achieved at atmospheric or high pressure. In the process reduced electric field is above 400Td, average electron energy is more than 10eV and the electron density is higher than 10 15 /cm 3. Most of gas molecules in reactor are decomposed and ionized into the activated particles such as electrons, ions, radicals, excited atoms and so on. A new substance can be resynthesized using the activated atoms and atomic groups.
出处
《东北大学学报（自然科学版）》
EI
CAS
CSCD
北大核心
2002年第5期507-510,共4页
Journal of Northeastern University(Natural Science)
基金
国家自然科学基金重点资助项目 (60 0 3 10 0 1)
关键词
强电离放电
介质阻档放电
非平衡等离子体
高能电子
等离子体化学
电介质材料
dielectric barrier discharge
strong ionization
non equilibrium plasma
high energy electron
plasma chemistry
dielectric material
