摘要
结合微型隧道效应磁强计的制作 ,在同一个硅片上制作了与磁强计功能结构相似的两端固支梁结构 ,采用谐振频率法 ,进行复合膜机械特性的测量。通过测量不同长度的梁的谐振频率 ,同时得到复合膜的杨氏模量和残余应力参数。测量结果表明 ,以浓硼硅为主要材料的复合膜的杨氏模量和残余应力分别为 1 2 0 .2 GPa和 - 6 6 .4MPa。
The mechanical properties of silicon thin films, such as Young's modulus, the residual stress and Poison's ratio, are important parameters for the design of MEMS devices. These parameters depend on the process and the dimensions of the structures. Thus, it is necessary to do measurements on the device wafer. In our design of a micro tunneling magnetometer, clamped-clamped beams similar to the functional structure of the sensor are fabricated on the same wafer to determine the characteristics of the sensor. The resonant frequencies of beams with different lengths are measured to determine the residual stress and Young's modulus at the same time. The results show that Young's modulus and the residual stress of the composite film are 120 2 GPa and -66 4 MPa respectively.
出处
《中国机械工程》
EI
CAS
CSCD
北大核心
2002年第11期987-989,共3页
China Mechanical Engineering
