摘要
用物理气相沉积法在水平系统中生长有机半导体并五苯晶体薄膜 .用 1 0~ 3 0 mg的源生长出 2 0~ 3 0 mm2 大小的适合特性测量和器件制备的晶体薄膜 .利用 TEM,SEM和
Physical vapor deposition in horizontal systems has been used for the growth of crystal thin-film of organic semiconductor pentacene. By using 10~30 mg starting material, 20~30 mm 2 sized crystals thin-film, suitable for the characterization measurements of the device fabricated, has been grown. And we have analyzed the thin-film of pentacene crystal by using TEM, X-ray diffraction and scanning electron microscopy.
出处
《吉林大学学报(理学版)》
CAS
CSCD
北大核心
2002年第3期288-289,共2页
Journal of Jilin University:Science Edition
基金
国家自然科学基金 (批准号 :6 0 176 0 2 2 )