摘要
紫外滚动压印因其可以在室温下、普通大气环境中高效大面积地进行微结构制作而备受瞩目.利用自行研制的紫外滚动压印装置,实现了微结构的快速复制.实验中发现当压印速度达到某一特定值时,会不可避免地产生气泡缺陷.采用流体软件Fluent对滚动压印充填过程进行分析,来研究气泡缺陷的产生机理.结果表明,压印速度过高导致空气被堵在图形空腔内,最终形成气泡缺陷.同时,低黏度的胶液和小的接触角更利于模型填充.此研究对于获得优化的滚动压印工艺具有一定的意义.
The UV roll-to-roll(R2R) imprinting technique can provide a solution for low cost and largescale throughput of reproducing microstructures at room temperature in atmospheric environment. A self-developed UV R2R imprinting device was used to fulfill fast rolling printing of microstructures, The re-peated experiments reveal that there is a maximum imprinting velocity if a perfect printed model withoutbubble defects could be gained. The computational fluid dynamics software--Fluent was employed tostudy the resin filling process of R2R imprinting to obtain the forming mechanism of bubbles. Results in-dicate that air will be trapped in the pattern cavity if the imprinting velocity is too large, which bringsabout bubbles. Meanwhile, the lower viscosity resin and small contact angle are highly desired for thefilling process, which is significant for getting optimization of R2R imprinting parameters
出处
《纳米技术与精密工程》
CAS
CSCD
2014年第4期281-285,共5页
Nanotechnology and Precision Engineering
基金
国家自然科学基金资助项目(50905173
51075381)
关键词
滚动压印
紫外压印
气泡缺陷
流体仿真
roll-to-roll imprinting
UV imprinting
bubble defects
fluid simulation