摘要
通过介绍静电相关速度分布测量原理,说明实现不同侧电极静电信号有效相关计算的重要性。为保证不同侧相关有效性,对多电极静电传感器进行有效相关分析,提出有效相关分析方法,进行多电极静电传感器结构优化。最后经过实验验证,优化后的多电极静电传感器不同侧电极静电信号能够实现有效的相关计算,为进一步研究速度分布的测量奠定了基础。
By introducing principle of electrostatic correlation based velocity distribution measurement, importance of effective correlation calculation by non-corresponding side electrode couples is emphasized. In order to ensure its effectiveness, effective correlation analysis on multi-electrode electrostatic sensor is carried out, and effective correlation analysis method is proposed, according to this, the structure of multi-electrode electrostatic sensor is optimized. Finally, through experimental verification,it show that correlation calculation of non-corresponding side electrode couples can be realized effectively by the optimized multi-electrode electrostatic sensor, which lays a foundation for further research on velocity distribution measurement.
出处
《传感器与微系统》
CSCD
北大核心
2014年第8期87-89,93,共4页
Transducer and Microsystem Technologies
基金
国家自然科学基金资助项目(61072101)
教育部新世纪优秀人才支持计划资助项目(NECT-10-0621)
天津大学自主创新基金资助项目
关键词
速度分布
传感器优化
多电极静电传感器
有效相关计算
velocity distribution
sensor optimization
multi-electrode electrostatic sensor
effective correlationcalculation
