摘要
提出了一种用衍射微透镜阵列对半导体激光光束进行匀化的方法,解决了折射型微透镜阵列难于实现高填充因子、高精度面型的难题。基于标量衍射理论,设计了具有多阶相位结构的衍射微透镜阵列。采用菲涅耳衍射公式,推导了半导体激光从输入面到输出面的光场计算公式。数值模拟了成像型微透镜阵列匀化系统,并研究了微透镜口径及相位台阶数对焦斑均匀性的影响。结果表明:当衍射微透镜的口径D=0.27 mm、相位台阶数L=16时,可获得不均匀性约为±5%、系统能量可利用率达97%的均匀焦斑。
In order to solve the problem that the high fill factor and accuracy of the refractive lens are difficult to realized , a new approach for homogenization of semiconductor laser by using diffractive micro-lens array was proposed . And diffractive micro-lens array with phase steps based on the theory of scalar diffraction was designed . The equation of intensity distribution in the focal plane was derived by the Fresnel diffraction equation . The imaging homogeneous system of diffractive micro lens array was simulated and the influences of diameter and phase steps of diffractive micro-lens on the intensity distribution were studied . The results show that the non-homogeneity about ＆#177; 5% and energy efficiency over 97% of the focal speck can be achieved with micro-lens diameter of 0 . 27 mm and phase steps of 16 .
出处
《红外与激光工程》
EI
CSCD
北大核心
2014年第7期2092-2096,共5页
Infrared and Laser Engineering
基金
中国科学院开放课题(JTJG201206)
关键词
光束匀化
衍射光学
半导体激光器
微透镜阵列
beam homogenization
diffractive optic
semiconductor laser
micro-lens array
