摘要
介绍了一种精密气控系统的设计与实现方案,该系统通过智能算法将气源控制为恒定压力、流量的输出气体,满足半导体行业需求。首先,采用AMESim提供的元件设计库构建了气体控制回路动态仿真模型,调节回路内关键节点的气体压力和流量特性参数进行时域分析,以验证模型的正确性。其次,通过CompactPCI总线机箱执行实时采集和闭环控制,并利用QWT库实现人机交互图形界面。实验结果表明,该系统具有便携性、可配置性、实时性、高精度等特点,适用于低流量、高稳态氮气供给应用场景。
This paper presents the design and implementation of a precision pneumatic control system.Through the intelligent algorithm,the system controls gas source for constant pressure and flow output to meet the requirement of the semiconductor industry.First of all,via the use of component design library provided by AMESim,gas dynamic simulation model is built.By adjusting gas pressure and flow parameters of key nodes within the loop,the paper analyses temporal characteristics to verify the correctness of the model.Secondly,the system performs real-time acquisition and closed-loop control in CompactPCI bus chassis and achieves human graphics interface based on QWT library.The experimental results show that precision pneumatic control system is portable,configurable,real-time,and high-accuracy,which is suitable for low flow and high steady state nitrogen supply scenarios.
出处
《国外电子测量技术》
2014年第7期21-24,共4页
Foreign Electronic Measurement Technology
基金
国家重大科技专项02专题(2009ZX02205)项目
关键词
气路仿真
压力控制
流量控制
QWT
gas route simulation
pressure control
flow control
QWT
