摘要
介绍了一种1530nm透射、1560nm反射和45°工作列近红外分色片的设计与制备方法。选择Ta2O5和SiO2两种光学薄膜材料,采用多谐振腔法布里-珀罗(F-P)窄带滤光片结构作为初始膜系,并选择4H作为谐振腔的间隔层进行消偏振设计,实现分色片透、反射过渡区域的压缩。采用电子束蒸发加离子辅助沉积技术,并应用光学极值法监控各膜层厚度,实现分色片多层膜的制备。利用分光光度计对分色片的光谱进行了分析测试,结果表明研制出的分色片在工作波长的光学能量传递效率高于92%,适用于空间激光通信系统中不同波长信号的分离与高效传递。
45° near-infrared dichroic beam splitter, with the spectrum 1530 nm transmitted and 1560 nm reflected, is designed and fabricated. Ta2O5 and SiO2 are selected as high and low refractive index materials. The structure of multiple cavity Fabry-Perot filter with 41-I spacer is used to reduce the transitional region between transmittance and reflectance wavelength. The materials are evaporated by ion-assisted electron beam deposition, and optical monitoring method is used to control the thickness of each layer. The spectrum of the dichroic beam splitter is measured by spectrophotometer. The result shows that the optical energy transfer efficiency is higher than 92 %, and the dichroic beam splitter is suitable for space laser communication system to separate different wavelength efficiently.
出处
《光学学报》
EI
CAS
CSCD
北大核心
2014年第8期333-336,共4页
Acta Optica Sinica
关键词
薄膜
近红外
分色片
多谐振腔
空间激光通信
thin films, near-infrared
dichroic beam splitter
multiple cavity
space laser communication
