摘要
光刻机控制系统是高精度伺服控制系统,其控制精度受环境因素(温度、湿度等因素)影响很大。为了实现对光刻机的高精度伺服控制,必须实时反馈周围环境的变化。状态机具有速度快、可靠性高、稳定性好的特点。本课题采用AD7606采样芯片,利用FPGA的可编程逻辑控制的特点,采用状态机思想,通过编程设计AD的读控制时序和读写时序,将采样结果实时保存在双口RAM里,实现高精度多通道AD采样系统。通过实验表明,设计的采样系统其速度、可靠性、采样精度达到要求。
Lithography machine control system was the high-precision servo control system,environmental factors（tem- perature,humidity,and other factors）have a significant impact on the control precision. In order to achieve high-pre- cision servo control,real-time feedback of the changes in the surrounding environment was needed. The state ma- chine has the characteristics of high speed,high reliability and stability. This paper uses AD7606 chip sampling,uti- lize the characteristics of FPGA programmable logic control,programming AD read and write timing in the form of the state machine,the real-time sampling results stored in the dual-port RAM,to reach the high-precision multi- channel AD sampling system. The experiments shows that the speed design of the sampling system was reliability and accuracy.
出处
《自动化与仪表》
北大核心
2014年第9期49-52,共4页
Automation & Instrumentation
