摘要
研究了完全合金化和完全未合金化钛铝靶材的结构,并研究了采用磁控溅射法,通氮气与不通氮气条件下沉积涂层的成分、结构和性能,探讨了不同相结构钛铝靶材与其沉积涂层在成分、结构和性能之间的关系。
Alloyed and unalloyed TiAl target’s phase structure was studied. The coating was prepared by magnetron sputtering under nitrogen condition and vacuum condition. The composition, phase structure and property of coating were also studied. The relationship between them was discussed.
出处
《热加工工艺》
CSCD
北大核心
2014年第18期143-146,共4页
Hot Working Technology
基金
国家自然科学基金资助项目(51275323)
国家科技重大专项资助项目(2012ZX04003011)
关键词
靶材
涂层
磁控溅射
target
coating
magnetron sputtering
