摘要
采用模拟和实验相结合的方法,研究了真空定向凝固系统中炉内底部保温层结构对多晶硅温度场及凝固过程中固-液界面的影响,对比了底部保温层为开口、半封闭与全封闭3种情况下的温度分布及凝固情况。模拟的结果表明,在底部保温层全封闭时,热区的辐射加热效果加强,同时也增加了冷区的散热效果,使坩埚中的硅料温度梯度增大。在此基础上,建立了不需要进行坩埚底部水冷换热的凝固系统,并进行了实验。实验结果与理论分析基本一致,说明可以通过调节炉内装置来优化多晶硅的真空定向凝固系统,对该系统的设计和优化起到指导与参考作用。
The effect of the bottom insulation layer structure on the temperature field and solid-liquid interface of poly-silicon in a vacuum directional solidification reactor was physically modeled, theoretically simulated, and experimentally optimized. The thermal performance of the three different bottom configurations, including the open, semi-closed, and closed ones, were investigated and compared. The simulated results show that when it comes to directional solidification of poly-silicon, the closed-bottom structure outperforms the other two configurations. For example, the bottom closed insula- tion results in a larger temperature gradient of poly-silicon because of stronger heating in the heating zone and faster cooling in the condensation zone. The simulated results were tested in a newly-developed crucible without water-cooler. The experimental data were found to be consistent with the simulated results.
出处
《真空科学与技术学报》
EI
CAS
CSCD
北大核心
2014年第10期1123-1127,共5页
Chinese Journal of Vacuum Science and Technology
基金
国家自然科学基金项目(51066003和U1137601)
国家科技支撑计划项目(2011BAE03B01)
教育部创新研究团队项目(Grant No.IRT1250)
关键词
多晶硅
真空定向凝固
系统仿真
实验研究
保温结构
Polysilicon, Vacuum directional solidification, System simulation, Experimental research, Insulation construction
