摘要
采用溶胶-凝胶旋涂法并结合氢气还原工艺,在Si(001)基片上制备了FeCo/SiO2复合薄膜,利用X射线衍射、原子力显微镜和振动样品磁强计研究了SiO2含量对薄膜样品的结构、形貌和磁性能的影响。结果表明,随着SiO2含量的增加,FeCo/SiO2薄膜中FeCo的晶粒尺寸减小,样品的矫顽力呈现先略有降低然后增加的趋势。当w(Si O2)低于43%时,Fe Co具有较明显的(200)晶面择优取向。当w(SiO2)为23%时,FeCo的(200)晶面择优取向度最高,样品的矫顽力最小,复合薄膜具有较好的软磁性能和较大的垂直磁晶各向异性。
FeCo/SiO2 thin films were fabricated using a sol-gel spin-coating method combined with hydrogen reduction process on Si（001） substrates. Effects of SiO2 content on structures, morphologies and magnetic properties of the samples were investigated by X-ray diffraction（XRD）, atomic force microscopy（AFM） and vibrating sample magnetometer（VSM）. The results indicate that with increase of SiO2 content, the average size of Fe Co grains in the Fe Co/SiO2 thin films decreases, while the coercivity of the samples firstly decreases slightly and then increases. Fe Co exhibits a pronounced preferential orientation of（200） plane when w（SiO2） is lower than 43%. The sample has the strongest preferential orientation of Fe Co（200） plane and minimum coercivity value when w（SiO2） is 23%, indicating a good soft magnetic properties and high perpendicular magneto-crystalline anisotropy.
出处
《电子元件与材料》
CAS
CSCD
北大核心
2014年第12期21-24,共4页
Electronic Components And Materials
基金
吉林省青年基金资助项目(No.20090144)
