摘要
在保证光学元件极高面形精度和极高调节精度的同时，为了实现更大的调节行程，采用柔性环片结构，设计了一种光学元件轴向精密调节机构。建立了调节机构的有限元分析模型，分析了主要设计参数对调节机构的调节行程、应力值、固有频率、光学元件上下表面面形均方根（RMS）值等性能指标的影响。结果表明：轴向调节机构可实现299.2 μm的调节行程，且机构的最大应力值为141.3 MPa，固有频率值为95.3 Hz，光学元件上下表面的面形RMS值在1.3 nm以内，满足光刻投影物镜对轴向调节光学元件的使用需求。
In order to ensure high surface shape precision and high regulation accuracy, while acquiring larger adjusting stroke of optical elements, an axial fine adjusting mechanism using flexible ring is designed. A finite element analysis model of the adjusting mechanism is established. The relationship between the main design parameters and the specifications of the adjusting mechanism such as the stroke, stress, natural frequency and root mean square （RMS） value of the upper and lower surface shape of the optical element is investigated. The design and analysis results show that the adjusting mechanism can reach the stroke of 299.2 μm under the stress of 141.3 MPa, the natural frequency of 95.3 Hz, and the RMS value of the upper and lower surface shape within 1.3 nm, which meets the requirements of the axial adjustable optical element in the lithographic projection objective lens.
出处
《光学学报》
EI
CAS
CSCD
北大核心
2014年第B12期348-354,共7页
Acta Optica Sinica
关键词
光学器件
轴向调节机构
有限元分析
柔性环片
optical devices
axial adjusting mechanism
finite element analysis
flexible ring
