摘要
对450型多晶硅型铸锭炉加热系统进行优化,提出了双区加热系统的理论,即对顶部加热器和侧面加热器加热功率分别控制;同时对侧面加热器结构进行优化。利用有限元软件ANSYS对加热系统优化后铸锭生长过程进行数值计算,对优化后硅料熔化过程、硅液内部温度分布、硅锭退火过程及硅锭纵向温度分布进行分析,计算结果显示,优化后硅液等温线较平坦、硅锭退火后温度梯度减小,熔化和退火阶段时间明显缩短,可以降低铸锭生产能耗,提高生产效率。
The heating system in type 450 polycrystalline ingot furnace is optimized and the two-zone heating system theory is raised in this paper, that is, to control the heating power of the top heater and the side heater respectively, and to optimize the side heater structure at the same time. By analyzing the silicon melting process, the silicon fluid inner temperature distribution, the annealing process of silicon ingots as well as their longitudinal temperature distribution after optimization with the software ANSYS, the calculation result shows that the isotherm of the optimized silicon fluid gets flatter and the temperature gradient after silicon ingot annealing narrows, with the melting and annealing time obviously reducing, so that the energy consumption in ingot production can be decreased and productivity be improved.
出处
《铸造技术》
CAS
北大核心
2014年第12期3027-3029,共3页
Foundry Technology
基金
山西省科技攻关项目(20130313003-2)
关键词
铸锭炉
双区加热
加热器
数值分析
ingot furnace
two-zone heating
heater
numerical simulation
