摘要
循环水系统的化学清洗及预膜工作是循环水系统正常稳定运行的基础。介绍了多晶硅循环水系统的化学清洗、预膜方法及注意事项,对预膜效果进行了评价。
Chemical cleaning and pre - film processing of circulating water system is the basis of normal and stable operation of the circulating water system. The chemical cleaning, pre - film methods and pre- cautions on the pre -film of polysilicon circulating water system were introduced and pre - film effects were evaluated.
出处
《云南化工》
CAS
2015年第1期56-58,共3页
Yunnan Chemical Technology
关键词
循环水
化学清洗
预膜
circulating water
chemical cleaning
pre - film