摘要
基于原子力显微镜的工作原理,设计了一种端点带反光镜的悬臂梁,实现光点位移放大,并利用位置敏感器件（PSD）将光点位置信息转换成光电流,从而设计出一种微位移测量系统。该系统结构简单、灵敏度高,适用于微小位移量的测量。文中给出了该测量系统检测原理,设计了信号处理电路,利用压电元件对悬臂梁端点微位移进行了检测。该系统可检测的线性位移量程为0～50μm,线性度为1.79%FS,分辨力可达50nm。
A Micro-displacement system is designed based on the working principle of an atomic force microscope. The system includes a cantilever endpoint with mirror that achieves optical displacement amplification,and a position sensitive device（ PSD） was used to convert spot position information into photocurrent. The system has advantage of simple structure and high sensitivity,which is suitable for small linear displacement measurement. The detection principle of the measurement system,the signal conditioning circuits were presented. The microdisplacement of the cantilever terminal,which was caused by the piezoelectric element,was measured also. The detectable linear dagree displacement range of the syste is 0 ～ 50μm,and the linearity is 1. 79% FS with resolution up to 50 nm.
出处
《信息技术》
2015年第3期36-39,共4页
Information Technology
基金
江苏大学大学生实践创新训练项目(2012064)
关键词
光杠杆
微位移
测量系统
PSD
信号处理
optical lever
micro-displacement
measurement system
PSD
signal processing
