摘要
根据工件与抛光盘的相对运动关系及熔石英元件抛光加工材料去除模型,系统分析了转速比和偏心距等参数对材料去除函数的影响。通过理论分析和抛光加工实验,研究了不同工艺参数对低频段面形精度的影响规律。利用高分辨率检测仪器对熔石英元件低频面形误差进行了检测,优选出较佳的抛光工艺参数组合,并进行了相应的实验验证,提出了提高光学元件抛光加工低频面形质量的相应措施。
Based on the relative motion of the workpiece and polishing dish,using the material removal model of fused silica optics,the influence of speed ratio and eccentricity on material removal function was analyzed,and the influence of polishing process parameters on the low frequency surface accuracy was studied by theoretical analysis and polishing experiments.Low frequency surface errors were detected using high-resolution detection equipment,preferred polishing process parameters were obtained,and the corresponding experiment was done for verification,an appropriate method was proposed to improve the low-frequency surface accuracy of fused silica optics in the polishing process.
出处
《强激光与粒子束》
EI
CAS
CSCD
北大核心
2015年第4期108-112,共5页
High Power Laser and Particle Beams
基金
国家自然科学基金与中国工程物理研究院联合基金项目(U1230110)
国家自然科学基金项目(51475106)
中国工程物理研究院超精密加工技术重点实验室开放基金项目(KF14007)
关键词
熔石英元件
抛光加工
工艺参数
面形误差
表面质量
fused silica optics
polishing process
process parameters
surface accuracy
surface quality
