摘要
通过有限元分析方法对三维温度梯度法(3DGF)单晶炉内的温场进行数值模拟计算,发现固液交界面附近存在较大的温度梯度,易导致晶体开裂;通过改进坩埚内壁锥度,调整底部隔热屏的结构,选择合适的降温程序取得了较好的实验效果。结果表明,在三维温度梯度法蓝宝石晶体生长过程中,合适的温度梯度和控温程序能够缩短生长周期,提高晶体质量。
Numerical simulation of the temperature field in three-dimensional temperature gradient （3DGF） single crystal furnace by the finite element analysis method found that near the melt-crystal interface existed a large temperature gradient, which easily lead to crystal cracking; through improving crucible inner wall taper, adjusting the bottom heat shield structure and selecting the appropriate cooling program, good experimental results were achieved. The results show that a suitable temperature gradient and temperature programs can shorten the growth cycle and improve the quality of the crystal in the 3DGF sapphire crystal growth process.
出处
《人工晶体学报》
EI
CAS
CSCD
北大核心
2015年第2期558-562,共5页
Journal of Synthetic Crystals
基金
教育部新世纪优秀人才计划(NCET-111-0659)
江苏省产学研联合创新资金-前瞻性联合研究项目(BY2014023-11)
关键词
3DGF法
蓝宝石
数值模拟
有限元
3DGF method
sapphire
numerical simulation
finite element
