摘要
为了提高激光跟踪仪的跟踪精度,改善激光跟踪仪性能,根据测量光斑在PSD上的坐标可实现光斑位移测量的原理,研究了提高微位移测量精度的方法,设计出一种由PSD传感器、ADS8556模数转换器和TMS320F28335数字信号处理器构成的高性能微位移测量系统。该系统在硬件设计中引入二阶有源低通滤波器消除了部分噪声干扰;在软件设计中通过误差补偿和数字滤波进一步提高了数据可靠性。加入抗干扰设计后,获得的二维坐标波动量峰峰值均在6μm以内。实验表明,该系统可获得高精度的光斑坐标,为激光跟踪仪精密跟踪奠定良好基础。
In order to improve tracking precision of the laser tracker and its performance, the paper researched a method of improving micro-displacement measurement precision according to the principle of measuring displacement of light spot by measuring its coordinate on the PSD and designed a high-performance micro-displacement measurement system which consists of PSD.ADS8556 and TMS320F28335. For eliminating the disturbance of some noise, the second--order active low- pass filter has been introduced in hardware design; for improving the reliability of data further, error compensation and digital filter have been applied in software design. The acquired peak-to-peak values of two-dimensional fluctuating quantity are all less than 6p^m after introduced anti-interference design. The experiment shows that the system could acquire high precise coordinate of the light spot and establish fine foundation for precise tracking of the laser tracker.
出处
《电子设计工程》
2015年第7期7-11,共5页
Electronic Design Engineering
基金
国家重大科学仪器设备开发专项资助(Y11702A01N)
