摘要
滚型纳米压印是一种高效、低成本批量化制造大面积微纳米结构的方法,已经被看成是最具有工业化应用前景的微纳米制造方法之一,同时也被认为是实现纳米压印技术从实验室到工业化应用的一个重要突破口。开展滚型纳米压印过程中模具变形机理和规律的研究,提出滚型纳米压印两种理论模型,揭示柔性接触滚轮模具变形的机理、规律和主要影响因素,阐述硬质接触和柔性接触两种压印方式显著区别和特点。该研究为探索减小弹性滚轮模具变形策略和方法,滚型纳米压印工艺要素的优化,以及提高滚型纳米压印复型精度和压印效率奠定了理论基础。
Roller-type nanoimprint lithography（NIL） is an emerging large-area nanopatterning method with high throughput, low cost and high resolution. It has been considered as a promising candidate for extremely low-cost mass production of micro/nanostructures and become the most potential manufacturing method for industrialization of nanoimprinting technology. The rolled mold deformation of roller-type NIL is investigated. Two theoretical models are proposed. Furthermore, the mechanism and influence factors of the roller mold deformation are revealed by theoretical analyses and numerical simulations. Some significant conclusions have been achieved. These findings are valuable in reducing mold deformation, optimizing imprinting process conditions, and enhancing the quality of imprinted patterns as well as further improving throughput.
出处
《机械工程学报》
EI
CAS
CSCD
北大核心
2015年第7期155-161,共7页
Journal of Mechanical Engineering
基金
国家自然科学基金纳米制造的基础研究重大研究计划(91023023)
国家自然科学基金(51375250)
教育部新世纪优秀人才计划(NCET-11-1029)
青岛市创业创新领军人才计划(13-CX-18)资助项目
关键词
纳米压印
模具变形
滚轮模具
柔性接触
纳米制造
nanoimprint lithography
mold deformation
roller mold
flexible contact
nanomanufacturing
