摘要
研究了一种用于颅内压测量的膜片式光纤法布里-珀罗压力传感器.外玻璃管和用于光纤准直的内玻璃管采用UV胶粘接,构成空气腔.在空气腔的一端粘接石英膜片,另一端插入多模光纤,石英膜片和光纤端面的两个反射面构成法珀干涉腔.制作了两种不同尺寸的传感器,在0～25 kPa的压力测量范围内,灵敏度高达39.2 nm/kPa,压强测量分辨率为133 Pa,线性拟合度为99.9％,具备生物兼容性,满足人体颅内压测量的需求.与商用的颅内压测量传感器相比,该传感器制作方法简单、成本低廉.
It was developed a miniature diaphragm-based Fabry-Perot （F-P） sensor for ICP measurement. An outer silica glass tube was bonded with an inner silica glass tube by UV glue to form an air cavity, where the inner silica glass tube was used to make the optical fiber be in alignment with the center of the silica glass diaphragm. The silica diaphragm was attached to one end of the air cavity and the optical fiber was inserted from the other end of the air cavity, where the endface of the well-cleaved optical fiber and the ultra flat silica diaphragm formed the F-P structure. Two kinds of sensors with different size were fabricated. The presented sensor exhibits a linear response to the applied pressure over the range of 0-25 kPa, with a sensitivity of 39. 2 nm/kPa and a resolution of 130 Pa, which can meet the requirements of intracranial pressure （ICP） measurement. Compared with the sophisticated process involved in making a commercially available fiber optic sensor for ICP monitoring, the reported sensor is simple to be fabricated at a low cost.
出处
《半导体光电》
CAS
北大核心
2015年第1期52-55,共4页
Semiconductor Optoelectronics
基金
北京科技新星计划交叉合作项目(Z121101002512111)
关键词
法布里-珀罗
颅内压
生物兼容
光纤压力传感器
Fabry-Perot
intracranial pressure
biomedical
fiber optic pressure sensor
