摘要
通过大量数据分析电磁场对等离子体源性能的影响,采用ANSYS有限元分析软件对等离子体源的静态电磁场进行模拟分析,应用SIMION静电透镜模拟软件对等离子体源进行粒子运动轨迹仿真验证和改进,最终得出结论管形结构的空心阴极等离子源结构简单,所得粒子运动轨迹较为均匀,但是粒子出射效率较低。平行结构空心阴极的等离子体源,结构新颖,选用边部向上弯曲的平行圆盘,并在上部放置一个永磁铁,此结构不但能够使得电子从四周逸出而且效率和速度也得到极大提高。
By analyzing large amounts of data of the influence of electromagnetic field on properties of the plasma source , the analog analysis of static electromagnetic field of plasma source ,by adopting the ANSYS software of finite element , and the imitation of the particle motion trajectory imitation of plasma source by applying SIMION software of electrostat‐ic lens to imitate ,this paper eventually completed the structure design of the plasma sources w hich is based on the tube type structure of hollow cathode .This structure is simple ,and the particle motion trajectories are relatively uniform ,but it has low er particle emission efficiency .Hollow cathode plasma source of parallel structure has the new structure ,w hich selects edges bent upward parallel disk ,and places a permanent magnet in the upper part .This structure is not only able to make electrons escaping from the surrounding and the efficiency and speed has also been greatly mentioned .This structure not only allow s electrons to escape from the surrounding ,but also the efficiency and speed has been greatly im‐proved .
出处
《国外电子测量技术》
2015年第4期19-26,30,共9页
Foreign Electronic Measurement Technology
关键词
等离子体源
离子束辅助沉积
电磁场
数值模拟
plasma sources
ion beam assisted deposition
electromagnetic field
numerical simulation
