摘要
阐述了多种多晶硅薄膜的制备方法和相关工艺技术,介绍了各种工艺条件对多晶硅薄膜材料的结构和性能等的影响,并比较了多种制备方法优点与不足,并对今后发展趋势和前景做出展望。
Various synthesis methods of poly-crystalline silicon films are introduced. The influences of preparation conditions on the quality, structure and properties of poly-Si thin films are analyzed. The advantages and disadvantages of different deposition methods are also compared. The development trends and prospects are proposed as well.
出处
《现代化工》
CAS
CSCD
北大核心
2015年第5期25-29,共5页
Modern Chemical Industry
基金
国家自然科学基金项目(21003069
21103078)
辽宁石油化工大学环境科学与工程学科创新团队([2014]11号)
关键词
多晶硅薄膜
化学气相沉积
固相晶化
金属诱导晶化
太阳能电池
poly-Si thin films
chemical vapor deposition
solid phase crystallization
metal induced crystallization
solar cells
