摘要
设计了一种基于谐振腔原理的位移传感器，能够通过谐振频率的改变进行位移的测试。此微波传感器能够承受高温、高污染等恶劣的工作环境，适合应用于航空发动机的叶尖间隙测试。在理论分析的基础上，建立了工作在24 GHz 左右的微波传感器模型，通过模拟计算得到了量程在0～6 mm 时大于240 MHz/μm的测试灵敏度，验证了该设计的正确性。
A displacement sensor based on principle of resonant cavity is designed,which can carry out displacement test through change of resonant frequency. It can bear harsh working environment such as high temperature and pollution,and is suitable for application in tip clearance test of aeroengine. On the basis of theoretical analysis,model of microwave sensor working at 24 GHz is established,test sensitivity is more than 240 MHz/μm at range of 0~6 mm obtained by simulation calculation and verifies that this design is correct.
出处
《传感器与微系统》
CSCD
2015年第6期98-101,共4页
Transducer and Microsystem Technologies
关键词
微波传感器
谐振腔
谐振频率
microwave sensor
resonant cavity
resonant frequency
