摘要
采用热丝化学气相沉积法在p型硅衬底上制备了不同织构的多晶金刚石膜,使用XRD表征了CVD金刚石膜的结构特征,研究了退火后不同织构金刚石膜的电流特性,使用Hall效应检测仪研究了金刚石膜的霍尔效应特性及随温度变化的规律,结果表明所制备的金刚石膜是p型材料,载流子浓度随着温度的降低而增加,迁移率随着温度的降低而减小.室温下[100]织构金刚石薄膜的载流子浓度和迁移率分别为4.3×104cm 3和76.5 cm2/V·s.
Due to its smoothest surface, fewer defects, and better crystal quality, [100] textured diamond film is well suited for the application of optoelectronic and microelectronic devices. Carrier concentration and mobility are very important parameters of semiconductor materials. In order to further broadening the application of diamond films in optoelec-tronics and microelectronics, it is necessary to made a research on Hall effect characteristics of [100] textured and [111] textured films. In this paper, different textured polycrystalline diamond films are deposited on silicon substrates by hot filament chemical vapor deposition （HFCVD） method under different conditions. Microstructures of diamond films are characterized by X-ray diffraction （XRD）. High quality [100] textured and [111] textured diamond films are ob-tained. Dark current-voltage （I-V ） characteristics of different-oriented films after annealing are investigated at room temperature. The carrier concentration and mobility of diamond films are measured by Hall effect test system as the temperature changing from 100 to 500 K. Results indicate that the textures of diamond films affect the value of carrier mobility： carrier concentration increases and mobility decreases with the decrease of temperature; and the deposited films are of p-type materials. The carrier concentration and mobility of polycrystalline [100]-textured diamond films at room temperature are 4.3 x104 cm3 and 76.5 cm2/V·s, respectively.
出处
《物理学报》
SCIE
EI
CAS
CSCD
北大核心
2015年第11期366-370,共5页
Acta Physica Sinica
基金
国家自然科学基金(批准号:61176072)
上海市人才发展基金(批准号:201425)资助的课题~~
关键词
金刚石膜
载流子浓度
迁移率
霍尔效应
diamond films
carrier concentration
mobility
Hall effect
