摘要
本文对二氯二氢硅反歧化反应在热力学上的可行性进行了理论研究;并借助计算机模拟,探讨了不同温度、压力和进料配比对二氯二氢硅在反歧化系统中的转化率的影响;结合实际生产进一步证实了选择的生产条件有利于反歧化反应的进行。
The paper carries out theoretical study of the feasibility of the thermodynamic for dichlorosilane anti-disproportionation reaction; and discusses the conversion rate effects of different temperature, pressure and feed ratios on the dichlorosilane in anti-disproportionation system by means of computer simulation; further confirms the selection of conditions is conducive to the production of anti-disproportionation reaction in combination with actual production.
出处
《有色冶金节能》
2015年第3期48-51,共4页
Energy Saving of Nonferrous Metallurgy
基金
多晶硅材料制备技术国家工程实验室基金项目(201310-213)
关键词
多晶硅
二氯二氢硅
反歧化
计算机模拟
转化率
polycrystalline silicon
dichlorosilane
anti-disproportionation
computer simulation
conversion rate
