摘要
报道了248 nm准分子激光微透镜整形均束装置的研制结果。实际采集并拍摄了248 nm准分子激光光能量分布的彩色图像,使用Matlab分析处理该图像并提取了相关信息进行计算,通过光学软件ZEMAX模拟出符合实际准分子激光光能量分布的光源。通过分析空间光能量分布特征,设计并加工出一套适用于248 nm准分子激光的微透镜整形均束装置,且理论模拟和实际测试结果相吻合。248 nm准分子激光通过该光学系统整形均束后,可以在工作平面上得到一个约18 mm×18 mm的正方形光斑,光斑的能量均匀度误差(加工窗)在±2%以内,平顶因子为0.90,光能量通过率为85%左右,解决了248 nm准分子激光光斑形状不规则,且光斑能量分布不均匀的问题。该装置的研制成功,对于优质、高效地开展准分子激光微加工提供了具有自主知识产权的技术支撑。
Research results of microlens beam shaping and homogenizing optical system for the 248 nm excimer laser are reported. Through the actual filming, an excimer laser light energy distribution color image is obtained. Matlab is used to analyze the image and extract relevant information to calculate. Then an actual energy distribution of excimer laser light source is simulated by the optical software ZEMAX. According to the characteristics of the light energy spatial distribution, a microlens beam shaping and homogenizing optical system for the 248 nm excimer laser is designed and fabricated. The experimental results are in good agreement with the theoretical simulations. After the shaping and homogenizing, a high uniform beam spot is obtained finally. The profile of this spot is a standard square with a size of 18 mm x 18 mm. The energy uniformity error （process window） of the beam spot is less than ＋ 2%, and the top- hat factor of energy distribution is about 0.90. This optical system can transform 85% of the total input beam power into the work plane of output beam. The spot shape of original excimer laser is irregular, and the energy distribution is non- uniform. This technical scheme can be a good solution to these problems. The successful development of this optical system has independent intellectual property rights, and also provides a technical support for the excimer laser micromachining with high quality and efficiency.
出处
《中国激光》
EI
CAS
CSCD
北大核心
2015年第6期16-29,共14页
Chinese Journal of Lasers
基金
国家自然科学基金(11374031)
北京市自然科学基金B类重点项目(JC101311201201)
