摘要
边缘电场传感器在工业生产过程控制中应用广泛。多波长传感器具有多个穿透深度,能够同时测量非均匀样本不同深度处的介电特性。以三波长叉指型传感器为研究对象,研制以TMS320F28335DSP为核心的介电测量系统,系统硬件包括驱动电路、调理电路、信号采集、人机接口、电源管理等。系统软件包括初始化、驱动控制、调理输出、计算模块、中断模块等。提出采用遗传算法优化的BP网络建立介电特性和极间电容之间的模型,根据系统测量的电容值求解介电常数。研制三波长传感器,利用测量系统进行实验,结果表明,该系统能够有效实现非均匀样本的分层分析。
The fringing electric field sensor is widely used in industrial process control. The multi-wavelength sen- sor has multiple penetration depths and can be used to measure the permittivity of non-uniform material simultane- ously at different depths. The paper focused on three-wavelength interdigital sensor. First, the measurement system based on TMS320F28335DSP is developed. The hardware includes driving circuit, conditioning circuit, simultane- ous sampling circuit, man-machine interface circuit and power management, while the software includes initiahza- tion, driving control, conditioning output, calculation module and interrupt module. Then the genetic algorithm op- timized back propagation networks （GABP） is proposed to establish the model of the non-uniform material permit- tivity and the capacitance. According to measured capacitance, the permittivity can be estimated. The three-wave- length sensor is fabricated for the multilayer sample measurement. The results show that the measurement system can implement non-uniform material stratified analysis effectively.
出处
《电子测量与仪器学报》
CSCD
北大核心
2015年第6期853-859,共7页
Journal of Electronic Measurement and Instrumentation
基金
国家自然科学基金(51007016)
安徽省科技计划(12010302059)项目
关键词
边缘电场传感器
介电测量
遗传算法
分层分析
fringing electric field sensor
permittivity measurement
genetic algorithm
stratified analysis
