摘要
为了解决非球面及自由曲面的高精度检测问题,基于二元光学计算机全息图(CGH)模型基础,分析了该模型下相位型CGH各项误差对CGH检测精度的影响,同时结合工程实例,针对口径为846 mm×630 mm的自由曲面,设计了相应的相位型CGH,并实验验证了该设计的可行性。结果显示:在设计时应先将相位型CGH的各个衍射级次进行分离;改变CGH到干涉仪焦点距离以减小刻画畸变同时保证CGH尺寸;再将基板误差检测出来,并代入设计结果进行补偿标定;最后在编码时将占空比选择为0.5,刻蚀深度选择在0.3λ减小占空比误差、相位函数误差和振幅误差。
To solve the high precision of testing of aspheric surface or even free-form surface, the line binary grating theory is used, gave the influence result of each errors of the computer generated hologram（CGH）, based on an 846 mm×630 mm free-form surface, the CGH to test the surface is designed and manufactured. The result shows that when design CGH to test surface, first separate the diffraction order, change the distance between the focus of the interferometer to CGH to decrease the pattern distortion; calibrate the substrate errors; at last choose duty-cycle to 0.5, etching depth to 0.3λ to decrease duty-cycle errors,phase function errors and amplitude errors when encoding.
出处
《光学学报》
EI
CAS
CSCD
北大核心
2015年第7期174-180,共7页
Acta Optica Sinica
基金
国家自然科学基金(61036015)
关键词
全息
计算全息图
高精度
自由曲面
误差分析
光学检测
holography
computer-generated-hologram
high-accuracy
free-form surface
error analysis
optical testing
