摘要
为研究差动电容式静电悬浮加速度计非线性、零偏、标度因数、噪声以及量程与闭环点位置的关系,推导了闭环点位置与上述参数关系的数学模型,分析了闭环点偏移来源。通过仿真和实验对比了闭环点调节前后系统非线性、零偏和量程,通过实验研究了闭环点位置波动对系统噪声的影响。仿真和实验结果表明,将敏感质量闭环点位置调节在机械零点附近可以降低系统非线性、零偏和系统噪声,并能提高理论量程。
In order to study the relationship between the closed-loop position （CLP） and nonlinearity, bias, noise and range of electro- statically suspended accelerometer, the model of the above parameters based on the closed-loop position is deduced, which is the origin of CLP shifting. The nonlinearity and bias, which are obtained before and after adjusting CLP, are compared with simulation and experiment methods. The noise caused by shifting of CLP is also investigated in the experiment. The results shows that one can decrease the nonlinearity, bias, noise and increase the range by adjusting the test mass to the mechanical zero position.
出处
《仪器仪表学报》
EI
CAS
CSCD
北大核心
2015年第7期1618-1625,共8页
Chinese Journal of Scientific Instrument
基金
清华大学自主科研计划(91436107)项目资助
关键词
非线性
闭环点位置
零偏
静电悬浮加速度计.
nonlinearity
closed-loop position
bias
electrostatically suspended accelerometer
