摘要
本文通过实验研究了SiCl4流化床加氢工艺,对温度、压力、料位压差及进料配比等因素对SiCl4转化率的影响进行了考察。结果表明,现有冷氢化流化床系统,四氯化硅转化率随温度、压力、反应料位压差、氢气与四氯化硅摩尔进料配比的增大而增大。
Hydrogenation process of silicontetrachloride on fluidized bed was investigated, and the effects of temperature, reactor pressure, differential pressure of material level, mole ratio of hydrogen to silicontetrachloride on the conversion were discussed. The results show that reaction conversion rate increases as temperature, reactor pressure, differential pressure of material level, mole ratio of hydrogen to silicontetrachtoride increase on fluidized bed.
出处
《世界有色金属》
2015年第8期17-20,共4页
World Nonferrous Metals
关键词
多晶硅
四氯化硅
流化床
冷氢化
Polysilicon
silicon tetrachloride
fluidized bed
hydrogenation
