摘要
针对现有的基于压电陶瓷叠堆执行器的快速控制反射镜偏转角度较小的问题,提出了一种大角度定轴偏转压电式快速控制反射镜。采用基于柔性铰链的桥式位移放大机构将压电陶瓷叠堆执行器的输出位移放大,并将其作用到反射镜面上实现大角度定轴偏转。在此基础上,建立了压电式快速控制反射镜的结构和偏转角度输出方程,并通过理论推导和仿真对其工作时的最大偏转角度、最大应力和自然频率特性进行了分析。最后,通过实验测试对建立的压电式快速控制反射镜的工作原理和特性分析结果进行了验证。结果表明,建立的偏转角度输出方程能够根据压电陶瓷叠堆执行器的输出位移准确估计压电式快速控制反射镜的机械偏转角度,从而大大提高设计的效率;建立的压电式快速控制反射镜可以实现大于3°的镜面机械偏转,其固有频率为180Hz,能够满足高速稳像系统的偏转角度大、响应速度快的要求。
To extend the excursion angle of the Piezoelectric Ceramic Stack Actuator（PCSA）based fast steering mirror（FSM）,apiezoelectric FSM with a large excursion angle and a fixed rotation axis was proposed and explored.The output displacement of the PCSA was amplified by a bridge-type flexure hinge and applied to a mirror to generate a fixed axis deflection with the large excursion angle.On this basis,the configuration and the corresponding output equation of the piezoelectric FSM were established,and the characteristics of the FSM,including the maximum excursion angle,the maximum stress,and the natural frequency,were analyzed through theoretical derivation and finite element simulation.Finally,the principle and characteristics of the proposed piezoelectric FSM were validated through experiments and tests.The results show that the output equation of the piezoelectricFSM estimates exactly the mechanical defection angles of the piezoelectric FSM based on the output displacement of the PCSA and improves the design efficiency.Moreover,the developed piezoelectric FSM provides a mechanical excursion angle larger than 3°with natural frequency of 180 Hz,which satisfies the requirements of the high-speed image stabilization system for the large excursion angle and rapid response.
出处
《光学精密工程》
EI
CAS
CSCD
北大核心
2015年第8期2258-2264,共7页
Optics and Precision Engineering
基金
中央高校基本科研业务费资助项目(No.CDJZR12120005)
关键词
快速控制反射镜
压电陶瓷叠堆执行器
倾斜镜
自适应光学
图像稳定
Fast Steering Mirror（FSM）
Piezoelectric Ceramic Stack Actuator（PCSA）
tilt mirror
adaptive optics
image stabilization
