摘要
研制了一套由环形半导体温控片、半导体温控片温度施加机构和温度控制电路组成的反射镜变形动态补偿系统。圆形反射镜在环形温度控制下,产生曲率可变的内凹或外凸球面变形,由此补偿激光反射镜自身热变形或激光系统中透射元件热变形产生的离焦量。采用口径为50 mm,厚度为10 mm平面反射镜进行了"施温-变形"以及"辐照—施温-变形"实验,利用干涉仪对面形进行监测。获得了温度-面形变化曲线,镜体中心位移和温度保持线性关系,在50℃温度下,中心最大变形量超过2.5μm,温度-变形系数为0.088μm/℃。在激光功率162 W辐照下,反射镜的热变形补偿量由0.3μm减小到0.08μm,对系统中透射元件的热变形量从0.28μm补偿至0.066μm。
A compensation system of mirror deformation is developed, and it is composed of an annular TEC, temperature force components and a control circuit. Under the effect of annular temperature, the mirror produces inner concave or external convex spherical deformation ,which can compensate the defocusing amount brought by the thermal deformation of the mirror itself or transmission optical element in laser system. The experiments of temperature-deformation and laser irradiation-temperature-deformation are conducted by using a flat mirror with the diameter of 50ram and the thickness of 10ram, and a interferometer is used to monitor the surface deformation. The temperature-deformation curve is obtained ;it shows the central displacement of mirror varies with the temperature linearly. The coefficient of tempera- ture-central displacement is 0. 088μm/℃ ,and the central displacement is over 2. 5μm under 50 ℃. When 162W laser is input in the mirror, self-compensation of thermal distortions of the mirror reduces from 0. 3 μm to 0.08 μm;the thermal deformation of transmission optical element reduces from 0. 28μm to 0. 066μm.
出处
《激光与红外》
CAS
CSCD
北大核心
2015年第10期1184-1188,共5页
Laser & Infrared
关键词
高功率激光
离焦量
热变形
热补偿
high power laser
defocusing amount
thermal deformation
thermal compensation
