摘要
对于高能激光输出波前中的低阶像差，可以使用柱面反射镜与球面反射镜组合对其中的离焦和像散进行补偿。根据悬臂梁理论设计了一种变形反射镜，并通过有限元仿真，对变形镜结构和各尺寸参数进行了优化，镜面行程达到19μm，残差峰谷值小于1．4μm。依据优化设计结果制作了柱面变形镜样件，使用菲索干涉仪对柱面变形镜的面型精度及压电陶瓷驱动电压与形变量的关系进行了测试。测试结果表明，通过控制压电驱动器的位移，这一结构的变形镜能够产生所需的抛物柱面，行程达到11μm。
There are usually large low order aberration in the output beam of high energy laser system. It＇s possible to compensate the defocus and astigmatism by a set of spherical concave mirrors and cylinder concave mirrors. According to the cantilever beam theory, a cylinder deformable mirror has been designed. By finite element simulation the structure and size parameters of the deformable mirror are optimized, and the deformation stroke reaches 19 μm, the residual peak to valley value is less than 1.4 μm. A prototype has been produced according to the optimal result. The surface precision and the relationship between deformation and driver voltage are measured by a Fizeau interferometer. The experimental results show that by controlling the displacement of the piezoelectric actuator, this deformable mirror structure can produce the desired parabolic surface, and stroke reachs 11 μm.
出处
《光学学报》
EI
CAS
CSCD
北大核心
2015年第A02期198-204,共7页
Acta Optica Sinica
基金
国家自然科学基金（61378065）
关键词
光学设计
自适应光学
变形反射镜
低阶像差
补偿
柱面
optical design
adaptive optics
deformable mirror
low-order aberration
compensation
cylinder
