摘要
相移干涉中,采用内像素椭圆拟合方法进行相移步长估计是一种有效的方法。提高这种方法的精度关键在于从干涉图中找到两组相差π/2的像素。通过对干涉序列图中局部区域灰度均值零、极点的位置计算,选定两幅相差π/2干涉序列图。运用这两幅干涉序列图,在对每个像素点采用四种灰度判别方法的基础上,提出了一种全视场范围内最大限度寻找相位相差π/2两组像素的方法。实验表明,这种方法比传统的方法具有更高的精度与普适性。
For phase-shifting interferometry, the inter-pixel algorithm with ellipse fit is a kind of effective method to get the phase shift steps. The key of improving the precision is to search two groups of pixels, whose phase difference is π/2, from the interferogram. Therefore, The two interferograms with phase difference π/2 are chosen by calculating the zero and peak positions for local gray mean values of all interferograms. Using these two interferograms, a method is presented to find two groups of pixels of phase difference π/2 with maximum number for the whole image based on four gray comparison methods. The experiment shows that the proposed method has higher accuracy and universality than the traditional method.
出处
《光学学报》
EI
CAS
CSCD
北大核心
2015年第11期165-172,共8页
Acta Optica Sinica
基金
国家自然科学基金(51175154
51275157
51275158)
天津大学精密测试技术及仪器国家重点实验室开放基金(PIL1209)
关键词
相干光学
相移计算
内像素法
干涉序列
压电陶瓷
coherence optics
phase-shifting calculation
inter-pixel
interferogram
piezo-electric transducer
