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化学浴沉积法制备Sb掺杂SnS薄膜 被引量:1

Preparation of Sb-doped Sn S Thin Films Deposited via Chemical Bath Deposition
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摘要 以氯化亚锡、硫代乙酰胺、三氯化锑为反应物,采用化学浴沉积法在玻璃衬底上沉积不同锑掺杂量(摩尔分数)硫化锡(Sn S:Sb)膜,研究了锑掺杂量对薄膜晶相结构、表面形貌和光电性能的影响。结果表明:锑掺杂Sn S薄膜是具有正交结构多晶薄膜,薄膜为纳米片组装成的花状球形颗粒。随着Sb掺杂量由1.8%增加到7.2%,其相应的禁带宽度从0.93 e V增加到1.30 e V。随着Sb掺杂量的增加,Sn S薄膜的电阻率呈现先下降后增大趋势,当Sb掺杂量为3.6%时,其最小值为5.21×103?·cm。 Sb-doped tin sulphide (SnS:Sb) thin films with different antimony contents (in mole fraction) were grown on a glass substrate via chemical bath deposition. The precursor solution was prepared from tin (II) chloride, thioacetamide and antimony trichloride. The influence of the content of Sb-doped on the crystal structure, morphology and photoelectric property was investigated. The results indicate that the films are polycrystalline SnS:Sb with the orthorhombic structure. The nanoflakes assembled flower-like spherical grains occur on the surface. The optical energy band gap value range from 0.93 to 1.3 eV were determined based on the transmittance spectra. The resistivity of SnS:Sb film firstly decreases and then increases with increasing the content of Sb/Sn ratio. The minimum resistivity is 5.21×10^3Ω·cm at a doping ratio of 3.6%.
机构地区 武汉理工大学
出处 《硅酸盐学报》 EI CAS CSCD 北大核心 2015年第12期1759-1764,共6页 Journal of The Chinese Ceramic Society
基金 武汉市科技计划(2015010101010006)资助
关键词 锑掺杂硫化锡薄膜 化学浴沉积 光电性能 Hall效应 tin-doped tin sulphide thin films chemical bath deposition optical and electrical properties Hall effect
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