摘要
为保证聚焦离子束(FIB)制造微细零部件或微刀具等的加工表面使用性能和使用寿命,研究了使用FIB技术加工单晶金刚石超硬材料的亚表层损伤。从粒子碰撞和能量交换两种角度分析了FIB加工亚表层损伤的形成原理,利用SRIM软件模拟了FIB加工单晶金刚石的离子轰击过程,确定了FIB亚表层损伤区域横截面半径,以及亚表层损伤深度。研究表明,理论上FIB加工金刚石靶材,其亚表层损伤截面半径不超过微米级零部件特征尺寸的2%,损伤深度不超过1%。
In order to upgrade the functional performance and expand the life-span of micro components and micro cutting tools fabricated by focused ion beam（ FIB）,the subsurface damage of super-hard single crystal diamond induced by ion beam is investigated. Subsurface damage evolving mechanism is analyzed based on particle collision and energy transformation theory. FIB sputtering process is simulated by using soft package SRIM,and the cross section radius and depth of subsurface damage area are determined in the simulating process. The research results show that the section radius and depth of damaged subsurface induced by FIB on single crystal diamond targets are less than 2% and 1% of the related characteristic dimensions of micro components,respectively.
出处
《燕山大学学报》
CAS
北大核心
2015年第5期420-424,463,共6页
Journal of Yanshan University
