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基于遗传算法透明介质膜层折射率及厚度在线分析 被引量:5

On-line Analysis on Refractive Index and Thickness of Dielectric Layer Based on Genetic Algorithm
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摘要 针对离线Low-E膜系产品设计及调试过程中对获悉透明介质膜层折射率及厚度的需求,提出依据在线测试膜层膜面反射光谱数据,建立Cauchy光学模型,利用遗传算法进行分析的方法。在线光谱测量装置安装于镀膜设备产品出口端,可以在镀膜玻璃宽度方向测量24个位置、380~780 nm波长范围的光谱,每测量点所需时间小于260 ms。根据Cauchy光学模型及离线Low-E膜系中透明介质膜层的特点,结合遗传算法原理建立分析流程,讨论了遗传算法主要参数对结果的影响。得到的最佳遗传条件为:种群大小为35个个体、遗传迭代40次、精英数量为8个,交叉比例0.2;根据实际生产的膜层膜面反射光谱特征,设立合理的初始值,可以使计算分析结果更正确。 For the requirement of off-line Low-E coating design and process of refractive index and thickness of transparent dielectric layer control, the method and the process of using genetic algorithm were proposed according to the on-line reflection spectra of the film surface and the Cauchy optical model. The on-line spectral measurement device was installed on the export side of the coating equipment, the width of the coated glass was measured at 24 points, and the wavelength range of each point was 380-780 nm, the time required for each measuring point was less than 260 ms. The characteristics of the Cauchy optical model and the dielectric film in the Low-E film system were discussed based on the principle of genetic algorithm to establish the analysis process of film refractive index and thickness, and the influence of the main parameters of genetic algorithms was discussed. The optimum genetic optimum condition is population size of 35 individuals, 40 iterations, the elite count of 8, and crossover fraction of 0.2. The reasonable initial value was established according to the reflectance spectrum characteristics of film surface for the more appropriate analysis of the results.
作者 余刚 汪洪
出处 《硅酸盐学报》 EI CAS CSCD 北大核心 2016年第1期148-154,共7页 Journal of The Chinese Ceramic Society
基金 国家"十二五"科技支撑计划项目(2013BAE12B01) 国家自然科学基金项目(51272245)
关键词 遗传算法 Cauchy模型 介质膜层 低辐射膜系 折射率 genetic algorithm Cauchy model dielectric layer low emissivity film optical thickness
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